Unconventional Nanopatterning Techniques and Applications

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Unconventional Nanopatterning Techniques and Applications

Unconventional Nanopatterning Techniques and Applications by Hong H. Lee
English | 28 Nov. 2008 | ISBN: 0470099577 | 598 Pages | PDF | 54 MB
Patterning or lithography is at the core of modern science and technology and cuts across all disciplines. With the emergence of nanotechnology, conventional methods based on electron beam lithography and extreme ultraviolet photolithography have become prohibitively expensive.


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